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Author Kitagawa, Hiroaki: 2

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2010-11 Thermal probe measurements of energy flux onto a substrate during ICP assisted sputter-deposition Kitagawa, Hiroaki; Kan, Ryoji; Mine, Kenji; Shinohara, Masanori; Matsuda, Yoshinobu 696
2010-01-21 Thermal Probe Measurements of Energy Flux onto a Substrate in Inductively Coupled Plasmas Kitagawa, Hiroaki; Kan, Ryoji; Shinohara, Masanori; Matsuda, Yoshinobu 827

 

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