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NAOSITE : Nagasaki University's Academic Output SITE > Faculty of Engineering > Bulletin > Reports of the Faculty of Engineering, Nagasaki University > Volume 33, No. 61 >

ハーモニック電子サイクロトロン共鳴マイクロプラズマ源の開発


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Title: ハーモニック電子サイクロトロン共鳴マイクロプラズマ源の開発
Other Titles: Development of Harmonic Electron Cyclotron Resonance Micro-Plasma Sources
Authors: 松下, 正典 / 松田, 良信 / 藤山, 寛
Authors (alternative): Matsushita, Masanori / Matsuda, Yoshinobu / Fujiyama, Hiroshi
Issue Date: Jul-2003
Citation: 長崎大学工学部研究報告 Vol.33(61) p. 57-61, 2003
Abstract: Generation of low-pressure micro-plasmas was investigated theoretically and experimentally by using the electron cyclotron resonance plasma generated in the narrow gap of a coaxial tube. By using xenon and by applying the magnetic flux densities satisfying from the harmonic ECR to ECR conditions, we have succeeded in generating micro-plasmas in the 500 μm gap of a coaxial tube at the pressure of 10^<-2> Torr.
URI: http://hdl.handle.net/10069/15049
ISSN: 02860902
Type: Departmental Bulletin Paper
Appears in Collections:Volume 33, No. 61

Citable URI : http://hdl.handle.net/10069/15049

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