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磁化プラズマCVDにおける薄膜堆積とシリコン微粒子の動的制御に関する研究


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Title: 磁化プラズマCVDにおける薄膜堆積とシリコン微粒子の動的制御に関する研究
Other Titles: Study on Thin Film Deposition and Dynamic Control of Silicon Particles in Magnetized Plasma CVD
Authors: 楊, 城彩
Authors (alternative): Yang, Sungchae
Issue Date: 31-Mar-1997
Citation: (1997-03-31)
Description: 長崎大学学位論文 学位記番号:博(海)甲第126号 学位授与年月日:平成9年3月31日
URI: http://hdl.handle.net/10069/18692
Type: Thesis or Dissertation
Appears in Collections:dissertation

Citable URI : http://hdl.handle.net/10069/18692

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