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Title: 反応性プラズマとイオンビームによる窒化炭素薄膜作製に関する研究
Other Titles: Studies on the formation of carbon nitride thin films using reactive plasma and ion beam
Authors: 陳, 潤植
Authors (alternative): Jin, Yunsik
Issue Date: 31-Mar-1999
Citation: (1999-03-31)
Description: 長崎大学学位論文 学位記番号:博(海)甲第164号 学位授与年月日:平成11年3月31日
URI: http://hdl.handle.net/10069/18694
Type: Thesis or Dissertation
Appears in Collections:dissertation

Citable URI : http://hdl.handle.net/10069/18694

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