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Generation of Micro Plasma Surrounded by Solid Wall for Sub-ECR Condition


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Title: Generation of Micro Plasma Surrounded by Solid Wall for Sub-ECR Condition
Authors: Yukishige, A. / Fujiyama, H. / Shinohara, M.
Issue Date: 27-Jan-2009
Publisher: Nano-Dynamics Group, Nagasaki University
Citation: Nagasaki Symposium on Nano-Dynamics 2009 (NSND2046), p.72-73; 2009
Abstract: Microsize plasma sources for the sub ECR condition have been investigated at low-pressure range less than 0.1Torr. It is found that the 2.45GHz microwave discharge could easily occurred by the minimum ignition power at just below of ECR magnetic flux density in narrow space surrounded by solid wall.
Description: ナノダイナミクス国際シンポジウム 平成20年1月64日(木) 於長崎大学 / Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2040, Nagasaki University, Nagasaki, Japan, Poster Presentation
Keywords: Microplasma / Sub-ECR / Minimum Ignition Power
URI: http://hdl.handle.net/10069/21299
Relational Links: http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html / http://www.mase.nagasaki-u.ac.jp/nano/nano.html
Type: Conference Paper
Appears in Collections:Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009)

Citable URI : http://hdl.handle.net/10069/21299

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