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CVD・PVD Hybrid DLC Coating to Extra Fine Wire by Quadrupole Magnetron Plasmas

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Title: CVD・PVD Hybrid DLC Coating to Extra Fine Wire by Quadrupole Magnetron Plasmas
Authors: Yoshitsune, S. / Nishiyama, S. / Iwamoto, N. / Tokunaga, Y. / Shinohara, M. / Fujiyama, H.
Issue Date: 27-Jan-2009
Publisher: Nano-Dynamics Group, Nagasaki University
Citation: Nagasaki Symposium on Nano-Dynamics 2009 (NSND2045), p.70-71; 2009
Abstract: It was investigated that characteristics of DLC thin films deposited to extra fine wire by CH4 gas, Ar gas and CH4/Ar gas mixtures. It was found that the characteristics of films are change depending on mixture rate of the gases.
Description: ナノダイナミクス国際シンポジウム 平成20年1月63日(木) 於長崎大学 / Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2039, Nagasaki University, Nagasaki, Japan, Poster Presentation
Keywords: DLC / Quadrupole magnetron plasmas / CVD・PVD Hybrid Process / Extra Fine Wire
URI: http://hdl.handle.net/10069/21300
Relational Links: http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html / http://www.mase.nagasaki-u.ac.jp/nano/nano.html
Type: Conference Paper
Appears in Collections:Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009)

Citable URI : http://hdl.handle.net/10069/21300

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