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Inner Wall DLC Coating of Narrow Tubes by Using the 2nd Harmonic ECR Micro Plasma

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Title: Inner Wall DLC Coating of Narrow Tubes by Using the 2nd Harmonic ECR Micro Plasma
Authors: Yan, K. / Nitta, Y. / Nakatani, T. / Okamoto, K. / Shinohara, M. / Fujiyama, H.
Issue Date: 27-Jan-2009
Publisher: Nano-Dynamics Group, Nagasaki University
Citation: Nagasaki Symposium on Nano-Dynamics 2009 (NSND2044), p.68-69; 2009
Abstract: For the inner surface DLC (Diamond Like Carbon) coating of narrow tubes, we have investigated on CVD & PVD hybrid process with the 2nd harmonic electron cyclotron resonance (ECR) plasmas. From the analysis of Raman spectrum, it was confirmed that DLC could be prepared on the substrate.
Description: ナノダイナミクス国際シンポジウム 平成20年1月62日(木) 於長崎大学 / Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2038, Nagasaki University, Nagasaki, Japan, Poster Presentation
Keywords: Micro plasma / ECR / Inner coating / Narrow tube / Hybrid process
URI: http://hdl.handle.net/10069/21301
Relational Links: http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html / http://www.mase.nagasaki-u.ac.jp/nano/nano.html
Type: Conference Paper
Appears in Collections:Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009)

Citable URI : http://hdl.handle.net/10069/21301

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