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Influence of hydrogen addition on electric and optical properties of sputter-deposited aluminum-doped zinc oxide thin films


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Title: Influence of hydrogen addition on electric and optical properties of sputter-deposited aluminum-doped zinc oxide thin films
Authors: Kan, Ryoji / Iwata, Tadashi / Shibasaki, Takashi / Shinohara, Masanori / Matsuda, Yoshinobu
Issue Date: 27-Jan-2009
Publisher: Nano-Dynamics Group, Nagasaki University
Citation: Nagasaki Symposium on Nano-Dynamics 2009 (NSND2031), p.44-45; 2009
Abstract: We have investigated the influence of hydrogen addition on AZO thin films. The electric conductivity of the film was improved when a very small amount of hydrogen (0.25%) was added, but was decreased by adding excessive amount of hydrogen. The optical transmittance and the deposition rate were almost constant for a small amount of hydrogen addition of not more than 0.5%, but decreased by adding excessive amount of hydrogen.
Description: ナノダイナミクス国際シンポジウム 平成20年1月49日(木) 於長崎大学 / Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2025, Nagasaki University, Nagasaki, Japan, Poster Presentation
URI: http://hdl.handle.net/10069/21314
Relational Links: http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html / http://www.mase.nagasaki-u.ac.jp/nano/nano.html
Type: Conference Paper
Appears in Collections:Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009)

Citable URI : http://hdl.handle.net/10069/21314

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