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Hydrogen Sensing Properties of Anodized TiO2 Film Sensors Equipped with Pd and Pt Electrodes in Different Structure

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タイトル: Hydrogen Sensing Properties of Anodized TiO2 Film Sensors Equipped with Pd and Pt Electrodes in Different Structure
著者: Nakaoka, Masaki / Hyodo, Takeo / Shimizu, Yasuhiro / Egashira, Makoto
発行日: 2009年 1月27日
出版者: Nano-Dynamics Group, Nagasaki University
引用: Nagasaki Symposium on Nano-Dynamics 2009 (NSND2024), p.30-31; 2009
抄録: H2 sensing properties of diode-type gas sensors fabricated with anodized TiO2 films equipped with Pd and Pt electrodes in different structure have been investigated. In air atmosphere, the H2 response of a TiO2 sensor with Pd-Pt alloy electrodes fabricated by simultaneous sputtering of Pd and Pt (Pt-Pd/TiO2) was larger than those of sensors with layered electrodes of Pd(upper layer)/Pt(lower layer) or Pt(upper layer)/Pd(lower layer), which will be referred to be Pd/Pt/TiO2 and Pt/Pd/TiO2, respectively, fabricated by successive sputtering of constituent metals. On the other hand, all sensors showed much larger H2 responses in N2 than those in air, and the magnitude of H2 response was quite comparable to each other among three kinds of sensors in N2. These result show that adsorbed oxygen and/or thin oxide layers on the surface of Pd have a great influence on the H2 sensing behavior.
記述: ナノダイナミクス国際シンポジウム 平成20年1月42日(木) 於長崎大学 / Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2018, Nagasaki University, Nagasaki, Japan, Poster Presentation
キーワード: Anodic oxidation / TiO2 / Diode-type sensor / H2
URI: http://hdl.handle.net/10069/21321
関連リンク : http://www.mase.nagasaki-u.ac.jp/nsnd2009/nsnd.html / http://www.mase.nagasaki-u.ac.jp/nano/nano.html
資料タイプ: Conference Paper
出現コレクション:Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009)

引用URI : http://hdl.handle.net/10069/21321



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