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Surface micromachining via solid electrochemical reaction on oxide ion conductors

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タイトル: Surface micromachining via solid electrochemical reaction on oxide ion conductors
著者: Kamada, Kai / Hirata, Shodai / Enomoto, Naoya / Hojo, Junichi
発行日: 2009年 8月17日
出版者: Elsevier BV
引用: Solid State Ionics, 180(20-22), pp.1226-1230; 2009
抄録: We propose a simple and novel route for the surface microstructuring of tough materials (glassy carbon, SiC, W and Mo) through a solid electrochemical reaction at a microcontact between the oxide ion conductor and target substrate. More specifically, the surface of materials was locally oxidized by an anodic electrochemical reaction with the oxide ion conductor via the microcontact under a dc bias. Since the oxidation products of the targets were gaseous or sublimable, a fine-patterned surface was obtained as a result of the continuous consumption of the oxidation products formed at the microcontact. The success of the proposed method may stimulate such conventional applications of oxide ion conductors.
キーワード: Oxide ion conductor / Microcontact / Micromachining / Solid electrochemical reaction
URI: http://hdl.handle.net/10069/22164
ISSN: 01672738
DOI: 10.1016/j.ssi.2009.06.007
権利: Copyright © 2009 Elsevier B.V. All rights reserved.
資料タイプ: Journal Article
原稿種類: author
出現コレクション:060 学術雑誌論文

引用URI : http://hdl.handle.net/10069/22164



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