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Review of Fabrication and Characterization of Nd–Fe–B Thick Films for Magnetic Micromachines

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タイトル: Review of Fabrication and Characterization of Nd–Fe–B Thick Films for Magnetic Micromachines
著者: Nakano, Masaki / Sato, S. / Yamashita, Fumitoshi / Honda, Takashi / Yamasaki, Jiro / Ishiyama, Kazushi I. / Itakura, Masaru / Fidler, J. / Yanai, Takeshi / Fukunaga, Hirotoshi
発行日: 2007年 6月
出版者: IEEE
引用: IEEE Transactions on Magnetics, 43(6), pp.2672-2676; 2007
抄録: Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 μm/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH)max of approximately 120 kJ/m3, which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the Isotropic films were introduced.
キーワード: Laser ablation / Micromachines / Micromotors / Thick film devices
URI: http://hdl.handle.net/10069/24046
ISSN: 00189464
DOI: 10.1109/TMAG.2007.893778
権利: © 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
資料タイプ: Journal Article
原稿種類: publisher
出現コレクション:060 学術雑誌論文

引用URI : http://hdl.handle.net/10069/24046



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