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Review of Fabrication and Characterization of Nd–Fe–B Thick Films for Magnetic Micromachines


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Title: Review of Fabrication and Characterization of Nd–Fe–B Thick Films for Magnetic Micromachines
Authors: Nakano, Masaki / Sato, S. / Yamashita, Fumitoshi / Honda, Takashi / Yamasaki, Jiro / Ishiyama, Kazushi I. / Itakura, Masaru / Fidler, J. / Yanai, Takeshi / Fukunaga, Hirotoshi
Issue Date: Jun-2007
Publisher: IEEE
Citation: IEEE Transactions on Magnetics, 43(6), pp.2672-2676; 2007
Abstract: Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 μm/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH)max of approximately 120 kJ/m3, which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the Isotropic films were introduced.
Keywords: Laser ablation / Micromachines / Micromotors / Thick film devices
URI: http://hdl.handle.net/10069/24046
ISSN: 00189464
DOI: 10.1109/TMAG.2007.893778
Rights: © 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Type: Journal Article
Text Version: publisher
Appears in Collections:Articles in academic journal

Citable URI : http://hdl.handle.net/10069/24046

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