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Mechanism of particle transport in magnetized silane plasmas


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タイトル: Mechanism of particle transport in magnetized silane plasmas
著者: Yang, S-C / Nakajima, Y / Maemura, Yoko / Matsuda, Yoshinobu / Fujiyama, Hiroshi
発行日: 1996年 5月
出版者: Institute of Physics Publishing
引用: Plasma Sources Science and Technology, 5(2), pp.333-338; 1996
抄録: Particle transport phenomena were investigated in silane plasmas in the presence of a magnetic field B perpendicular to a discharge electric field E. From the experimental results, it was concluded that silicon particles were transported in the opposite direction to the E × B drift, and the particle density decreased with increasing applied magnetic flux density. Theoretical calculations on particle drift show that negatively charged particles can be transported in the opposite direction to E × B drift and the drift velocity increases with B for the present experimental conditions. Both experimental and theoretical results suggest that transport by modified ambipolar E × B drift can eliminate particles from discharge space.
URI: http://hdl.handle.net/10069/25016
ISSN: 09630252
DOI: 10.1088/0963-0252/5/2/032
権利: This is an author-created, un-copyedited version of an article accepted for publication in Plasma Sources Science and Technology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The definitive publisher authenticated version is available online at http://dx.doi.org/10.1088/0963-0252/5/2/032.
資料タイプ: Journal Article
原稿種類: author
出現コレクション:060 学術雑誌論文

引用URI : http://hdl.handle.net/10069/25016

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