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タイトル: セラミックス材料の電子線超音波顕微鏡による非破壊・内部観察
その他のタイトル: Nondestructive Internal Observation of Ceramics Using Electron-Acoustic Microscopy
著者: 竹野下, 寛
著者(別表記) : Takenoshita, Hiroshi
発行日: 1996年 2月29日
出版者: 長崎大学教育学部
引用: 長崎大学教育学部自然科学研究報告. vol.54, p.37-44; 1996
抄録: An electron-acoustic microscopy (EAM) was proposed in 1980 as a means of nondestructive internal observation using ultrasonic signal excited by a choppedelectron beam. In a series of EAM studies, we have used semiconductor devices as a specimen. In this study, a ceramic disk making with a hot pressing method was lapped and a part of the disk surface was coated Au by vacuum deposition. The Au film on the surface was grounded for descharge. The disk used as a specimen, EAM images (EAIs) were obtained as the same of the devices case. Pores in the disk were detected nondestructively and the observable depth of the disk was depends on the change of acceleration voltage (HV) of the beam. EAIs at three HV conditions, with HV = 25kV, HV = 30kV and HV = 35kV were displayed on a CRT in blue, green and red respectively and were superimposed using a personal computer. The color at the pore in the superimposition image was changed. This indicated that the pore was a distribution with depth direction.
URI: http://hdl.handle.net/10069/32159
ISSN: 0386443X
資料タイプ: Departmental Bulletin Paper
原稿種類: publisher

引用URI : http://hdl.handle.net/10069/32159



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