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PLD-Fabricated Isotropic Pr–Fe–B Film Magnets Deposited on Glass Substrates

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Title: PLD-Fabricated Isotropic Pr–Fe–B Film Magnets Deposited on Glass Substrates
Authors: Yamashita, Akihiro / Hirotaki, Keishi / Kurosaki, A. / Yanai, Takeshi / Fukunaga, Hirotoshi / Fujiwara, Ryogen / Shinshi, Tadahiko / Nakano, Masaki
Issue Date: Apr-2017
Publisher: IEEE
Citation: IEEE Transactions on Magnetics, 53(4)
Abstract: Pr-Fe-B thick-film magnets were deposited on glass substrates without a buffer layer using a pulsed laser deposition method to apply the films to micro-electro-mechanical systems. Large particles with the average diameter of approximately 50~\mu \text{m} were emitted from a target and enabled us to obtain the relatively high deposition rate of 30~\mu \text{m} /h. An approximately 100~\mu \text{m} -thick Pr-Fe-B film with the (BH)-{\text {max}} value of 70 kJ/ \text{m}^{3} could be obtained. After polishing a Pr-Fe-B thick film deposited on a glass substrate with groove, the magnetic properties of the film did not deteriorate.
Keywords: Glass substrate / micro-electro-mechanical systems (MEMS) / Pr-Fe-B film magnet / pulsed laser deposition (PLD)
URI: http://hdl.handle.net/10069/37575
ISSN: 00189464
DOI: 10.1109/TMAG.2016.2633362
Rights: © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Type: Journal Article
Text Version: author
Appears in Collections:Articles in academic journal

Citable URI : http://hdl.handle.net/10069/37575

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