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NAOSITE : Nagasaki University's Academic Output SITE > Faculty of Engineering > Bulletin > Reports of the Faculty of Engineering, Nagasaki University > Volume 32, No. 59 >


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Title: ソフトフェライト膜作用Nd:YAGレーザーPLDシステムの開発
Other Titles: Development of Pulse Nd:YAG Laser Deposition system for Soft-FerrieFilm
Authors: 辻, 峰男 / 本城, 隆 / 泉, 勝弘
Authors (alternative): Tsuji, Mineo / Honjo, Takashi / Izumi, Katsuhiro
Issue Date: Jul-2002
Citation: 長崎大学工学部研究報告 Vol.32(59) p.75-78, 2002
Abstract: It was reported preparation of soft-ferrite film on the room-temperature substrate by pulse laser deposition (PLD) method with excimer laser. Thereafter, soft-ferrite film preparation by PLD method is widely noticed. But excimer laser is difficult to keep maintained by small laboratory, because of the running costs of excimer laser are very expensive. On the other hand, Nd : YAG laser has advantages of low running costs, high energy-stability and so on. So, PLD system with Nd : YAG laser was developed for soft-ferrite film preparation. In this report, we introduce details of the developed pulse Nd : YAG laser deposition system.
URI: http://hdl.handle.net/10069/5213
ISSN: 02860902
Type: Departmental Bulletin Paper
Appears in Collections:Volume 32, No. 59

Citable URI : http://hdl.handle.net/10069/5213

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