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Discussion on Barrier Discharge by Applying Circuit Theory

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タイトル: Discussion on Barrier Discharge by Applying Circuit Theory
著者: Itoyama, Kagehiro
発行日: 2002年 3月27日
引用: 長崎大学教育学部紀要. 自然科学. vol.66, p.53-59; 2002
抄録: The dielectric barrier discharge is the useful one as the plasma processing for the decomposition of TOx gas. This paper describes on the equivalent circuit for dielectric barrier discharge. Because we need to know how condition is the most effective on the plasma processing by employing barrier discharge. The author employed 3-Voltmeters Method and measured the phase difference between voltage and current, the power consumed by barrier discharge and the reactance of barrier discharge. From these measurements, the author has clarified that the equivalent circuit of barrier discharge is the series connection of the resistance and the capacitance. And the author has also reported the condition of the maximum power consumed in discharge.
キーワード: dielectric barrier discharge / equivalent circuit / decomposition of TOx gas
URI: http://hdl.handle.net/10069/6109
ISSN: 13451359
資料タイプ: Departmental Bulletin Paper

引用URI : http://hdl.handle.net/10069/6109



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