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Investigation of Deposition Process of Amorphous Carbon Film


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Title: Investigation of Deposition Process of Amorphous Carbon Film
Authors: Inayioshi, Takanori / Shinohara, Masanori / Kawazoe, Taiki / Matsuda, Yoshinobu / Fujiyama, Hiroshi / Nakatani, Tatsuyuki
Issue Date: 29-Jan-2008
Citation: Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008), pp.89-90
Abstract: The dependence of the deposition process of amorphous carbon films on growth temperatures has been investigated by using infrared spectroscopy in multiple internal reflection geometry (MIR-IRAS). The CH_3 peak of amorphous carbon film was decreased as the growth temperature was increased.
Description: Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008) 平成20年1月29日(火)於長崎大学 Poster Presentation
Keywords: amorphous carbon film / deposition process / hydrogen / infrared spectroscopy
URI: http://hdl.handle.net/10069/9868
Type: Conference Paper
Appears in Collections:Nagasaki Symposium on Nano-Dynamics 2008 (NSND2008)

Citable URI : http://hdl.handle.net/10069/9868

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